@article{146236,
  author = {H. Malissa and D. I. Schuster and A. M. Tyryshkin and A. A. Houck and S. A. Lyon},
  title = {Superconducting coplanar waveguide resonators for low temperature pulsed electron spin resonance spectroscopy},
  abstract = { We discuss the design and implementation of thin film superconducting coplanar waveguide micro- resonators for pulsed ESR experiments. The performance of the resonators with P doped Si epilayer samples is compared to waveguide resonators under equivalent conditions. The high achievable filling factor even for small sized samples and the relatively high Q-factor result in a sensitivity that is superior to that of conventional waveguide resonators, in particular to spins close to the sample surface. The peak microwave power is on the order of a few microwatts, which is compatible with measurements at ultra low temperatures. We also discuss the effect of the nonuniform microwave magnetic field on the Hahn echo power dependence. },
  year = {2013},
  journal = {Review of Scientific Instruments},
  volume = {84},
  pages = {1{\textendash}4},
  issn = {00346748},
  doi = {10.1063/1.4792205},
  language = {eng},
}